Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
MANUFACTURE OF FIELD EMITTER
Document Type and Number:
Japanese Patent JPH10172421
Kind Code:
A
Abstract:

To provide a manufacturing method for a field emitter in which homogeneity and reproducibility of the field emitter can be improved.

A mask 3 is formed on a substrate 1, the substrate 1 is etched to such a degree that the mask 3 is not removed, the surface of the substrate 1 is thermally oxidized, and the mask 3 and thermally oxidized film under the mask 3 are eliminated to manufacture a field emitter in a field emitter manufacturing method, where a process of etching the substrate 1 to such a degree that the mask 3 is not removed comprises a process of diffusing impurities from a part (window-opened part) of the substrate 1 other than the mask 3 in a part where the substrate 1 is etched to such a degree that the mask 3 is not removed, and etching this diffusion part 4.


Inventors:
SHINOZUKA NORIYUKI
Application Number:
JP33127496A
Publication Date:
June 26, 1998
Filing Date:
December 11, 1996
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
HONDA MOTOR CO LTD
International Classes:
H01J9/02; B81C1/00; (IPC1-7): H01J9/02
Attorney, Agent or Firm:
下田 容一郎