Title:
MANUFACTURE OF INFRARED RAYS DETECTION ELEMENT
Document Type and Number:
Japanese Patent JPH04253344
Kind Code:
A
Abstract:
PURPOSE: To provide a method for manufacturing an infrared rays detection element whose patterning accuracy is improved by performing photolithography process on a plane.
CONSTITUTION: A plurality of recessed portions 10a corresponding to a desired element shape are formed on a substrate 10, a CdTe layer 12 is subjected to vapor growth on the substrate 10, an HgCdTe layer 14 is subjected to vapor growth or liquid phase growth to a specified thickness on the CdTe layer 12. and the CdTe layer 12 and the HgCdTe layer 14 which are formed at areas other than the recessed portion 10a on the substrate 10 are eliminated by abrasion.
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Inventors:
GOTO JUNJIRO
Application Number:
JP2664891A
Publication Date:
September 09, 1992
Filing Date:
January 29, 1991
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/36; H01L27/14; H01L31/0264; (IPC1-7): H01L21/36; H01L27/14; H01L31/0264
Attorney, Agent or Firm:
Akira Matsumoto
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