PURPOSE: To prevent the generation of peeling off and enhance yield by forming a specific reinforced glass ceramic green sheet so that it may be incorporated into a low dielectric glass ceramic green sheet into one piece.
CONSTITUTION: A reinforced glass ceramic green sheet is produced by partially replacing borosilicate crown glass with low softening point glass and laminated with a low dielectric glass ceramic green sheet 2 and fired so that it may be possible to obtain a multilayer ceramic circuit substrate where a low dielectric constant layer 5 is incorporated into a reinforced layer into one piece. In this case, the low softening point glass has a low softening point temperature and hence works as a binder for silica glass (SiO2) or mullite (3Al2O3.2SiO2) and thereby increases the density. This construction makes it possible to prevent the generation of peeling off and enhance manufacturing yield.
AOKI SHIGENORI
IMANAKA YOSHIHIKO
YOKOUCHI KISHIO