PURPOSE: To prevent the corrosion of a recording medium by moisture, oxygen, etc. by using glass in the formation of guide signals or guide addresses.
CONSTITUTION: Light 7 from Ar laser or the like is irradiated on a resist film 6 coated on a glass substrate 5 through an objective lens 8 to write lines having the same width as guide grooves for an optical memory element or broken lines for recording address signals, and the film 6 is grooved by development. The substrate 5 is then grooved 9 by sputtering through the film 6 in an etching gas such as CF4 or CHF3, and the film 6 is removed with a solvent such as acetone or by sputtering in O2. The grooves 9 remain in the substrate 5 which prevents the passage of oxygen, moisture, etc. with high reliability.
HIROKANE JIYUNJI
KATAYAMA HIROYUKI
TAKAHASHI AKIRA
YAMAOKA HIDEYOSHI
| JPS51135503A | 1976-11-24 | |||
| JPS5477105A | 1979-06-20 | |||
| JPS54107705A | 1979-08-23 | |||
| JPS54138405A | 1979-10-26 | |||
| JPS5210102A | 1977-01-26 |