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Title:
MANUFACTURE OF PELLICLE
Document Type and Number:
Japanese Patent JPH0477739
Kind Code:
A
Abstract:

PURPOSE: To prevent thin film pieces from scattering, falling onto the circuit pattern of a mask or a reticle and being faults by cutting off a thin film protruded to the outside of a supporting frame and afterwards finishing the end face of the supporting frame with solvent to dissolve the thin film.

CONSTITUTION: In the process of manufacturing the pellicle sticking the thin film onto the supporting frame in a uniformly tensed state, after cutting the supporting frame in a uniformly tensed state, after cutting off the thin film protruded to the outside of the supporting frame, the end face of the supporting frame is smoothly finished with the solvent to dissolve the thin film sot hat there cannot be any scattered thin film pieces. As the solvent to dissolve the thin film, isopropyl acetate, ethyl cellosolve acetate, or methyl ethyl ketone, etc., can be used. Finishing work is executed by including the solvent in a sponge-shaped object, which can include the solvent, and to lightly scrab the end face of the supporting frame.


Inventors:
YAMAKI KAORU
KURODA TAKAYUKI
MIYATA AKIHIRO
Application Number:
JP19124590A
Publication Date:
March 11, 1992
Filing Date:
July 19, 1990
Export Citation:
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Assignee:
DAICEL CHEM
International Classes:
G03F1/62; H01L21/027; (IPC1-7): G03F1/14; H01L21/027



 
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