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Patent Searching and Data


Title:
MANUFACTURE OF PROBE CARD
Document Type and Number:
Japanese Patent JPH0627142
Kind Code:
A
Abstract:

PURPOSE: To decrease the manufacturing cost of a probe card to a large extent, to improve the durability of the probes to narrow the pitch between the probes and to omit the position adjusting work for the probes by attaching the base end part of a plate of metal or conductor material to a probe card substrate, dividing and separating the plate of the metal or the conductor material, and forming many probes.

CONSTITUTION: In a probe-card manufacturing method, the base end part of shape is welded at several places of a pattern 3 provided on a probe a conducting plate of metal or conductor material having the specified card substrate 2. The plate of the metal or the conductor material and the welded part of the end part of the plate of the metal or the conductor material of the probe card substrate are divided and separated, and many probes 11,... and 12,... are formed. Slits 2b are formed on both sides of a part for supporting the probes 11 and 12 of the probe card substrate 2. The probe card substrate 2 has the flexibility, and many probes 11,... and 12,... are supported so that the probes can be moved up and down.


Inventors:
YOSHIDA KOICHI
Application Number:
JP1992000178409
Publication Date:
February 04, 1994
Filing Date:
July 06, 1992
Export Citation:
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Assignee:
DATA PUROOBU KK
International Classes:
G01R1/073; H01L21/66; (IPC1-7): G01R1/073; H01L21/66
Attorney, Agent or Firm:
磯野 道造