Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
MANUFACTURE OF RECTANGULAR SUBSTRATE FOR DISPLAY ELEMENT FORMATION
Document Type and Number:
Japanese Patent JPH10260397
Kind Code:
A
Abstract:

To provide the manufacture of the rectangular substrate for display element formation that can carry out surface processing for the rectangular substrate uniformly.

After rectangular substrates for display element formation which are stored in a cassette are taken out of a loader and an unloader part 1 one by one, preprocessing including etching or resist removal is performed according to a pattern formed on a square substrate P carried in a vertical state, and then a washing process and a drying process are carried out. The rectangular substrate P is sucked and held vertically.


Inventors:
MAEJIMA TARO
Application Number:
JP6502197A
Publication Date:
September 29, 1998
Filing Date:
March 18, 1997
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ADVANCED DISPLAY KK
International Classes:
G02F1/1333; B65G49/07; H01L21/304; H01L21/677; H01L21/68; (IPC1-7): G02F1/1333; B65G49/07
Attorney, Agent or Firm:
朝日奈 宗太 (外1名)