PURPOSE: To produce a simple stamper and thereby, manufacture an economical and highly accurate optical disc board by a method wherein the simple stamper is produced in the following processes: the irradiation of laser beams over a board, the insolubilization of the parts irradiated by laser beams through the treatment with amine-based catalyst, the exposure over the whole surface for the solubilization of the remaining part excluding the parts irradiated by laser beams, the production of reversed resist pattern and the etching of the board.
CONSTITUTION: Positive resist layer 2, which is formed by spin coating method or the like on board 1 made of glass, is irradiated by laser beams, which are modulated by the predetermined signals and, after that, treated with amine-based catalyst 4 in order to insolubilize parts irradiated by the laser beams. As the amine-based catalyst 4, ammonia gas and amine- based compound with catalytic activity are normally used. After that, through the exposure 5 of the whole surface of the board, the part, which is not irradiated by laser beams, is turned to be made soluble to developer so as to produce reversal resist pattern 6 through developing treatment. Etching is performed by utilizing the resist pattern 6 as mask so as to cut off the exposed part of the board in order to produce pattern and chip the remaining resist pattern, resulting in producing a transparent stamper 7. An optical disc board 10 is manufactured by irradiating light from both sides of photosetting resin 9, which is interposed between the transparent stamper 7 and a transparent keep plate 8, so as to set the resin.
KUWANO ATSUSHI
HANEHIRO MASANOBU
YAMADA MITSUO
OKADA TAKESHI
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