PURPOSE: To manufacture a stamper for an optical disk of superior precision with high yield and without introducing particularly sophisticated process into the manufacturing method heretofore available by ozone treating a matrix surface before coating the surface of a glass matrix with coating fluid for forming photoresist layer.

CONSTITUTION: An organic film 12 is formed on the surface after several tens of minutes after washing a glass matrix 11, and then ozone gas is jetted to the surface of glass matrix 11 to remove the organic film 12. Then, coating fluid for photoresist is applied on the surface of ozone treated glass matrix 11 as soon as possible after treatment. The bonding properties of the glass matrix and a photoresist layer is enhanced by the process, and stripping phenomenon such as lowering of thickness precision generated by an electroforming layer released from the glass matrix together with the photoresist layer or foaming generated by infiltration of plating bath into the photoresist layer is scarcely generated. As the formation is carried out on an optical disk matrix 14 in a good manner, grinding on the surface opposite to the side where recesses and projections are formed can be carried out with high precision.