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Title:
MANUFACTURE FOR THIN FILM MAGNETIC HEAD
Document Type and Number:
Japanese Patent JPH1186220
Kind Code:
A
Abstract:

To facilitate removal of a plating undercoat film at a narrow gap of coils, prevent a shortcircuit of coils and restrict an increase in resistance value of coils when the coils of a thin film magnetic head are formed.

After a coil plating undercoat film 9 is formed on an insulating layer, a thin film photoresist 10 is applied on the coil plating undercoat film 9. A photoresist pattern of coils 6 is formed. The thin film photoresist 10 of a part corresponding to a gap part 11 of coils is removed outside a magnetic pole range although an area orthogonal to the coils 6 is left. The remaining thin film photoresist 10 is then removed. A thick film photoresist 12 is applied to form a photoresist pattern of coils 6. The thick film photoresist 12 of an area corresponding to the coils 6 is removed. Thereafter, coils 6 are formed by electroplating. The remaining thick film photoresist 12 and the unnecessary coil plating undercoat film 9 are removed last.


Inventors:
OYOSHI KAZUYA
Application Number:
JP25073997A
Publication Date:
March 30, 1999
Filing Date:
September 16, 1997
Export Citation:
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Assignee:
NEC IBARAKI LTD
International Classes:
G11B5/31; H05K1/16; H05K3/10; (IPC1-7): G11B5/31
Domestic Patent References:
JPS6254524A1987-03-10
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)