To provide a manufacturing apparatus for a color filter and a manufacturing method of a color filter where the generation of defects such as color mixing and color unevenness caused by condensation generated in a heating stage is prevented, and yield can be improved.
In a reduced pressure heating apparatus 8d, the colored layer 45 of a substrate 3 is heated under a reduced pressure atmosphere. Moisture and a solvent are vaporized from the colored layer 45, so as to produce a vaporized component, and the vaporized component forms condensation and sticks to a cover 47d in a chamber 41. The reduced pressure heating apparatus 8d drives a support part 69-1 and a support part 69-2 supporting the cover 47d, so as to tilt the cover 47d, and moves the stuck condensation 53 along the cover 47d, so as to be collected in a tray 67. It is desirable that the surface of the cover 47d is subjected to waterproofing treatment or hydrophilizing treatment. Further, it may be combined with a condensation removing treatment mechanism.
TAZAKI TAKAYUKI
IZUHARA TOMOYUKI
YOSHIDA TATSUYA
| JPH0473562A | 1992-03-09 | |||
| JPH11511546A | 1999-10-05 | |||
| JP2005016799A | 2005-01-20 | |||
| JP2001066059A | 2001-03-16 | |||
| JP2002182028A | 2002-06-26 |
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