To detect positional information of a mark with high precision in a short time.

Since an index pattern T1 consisting of a combination of any three of marks m0-m5 included in a mark 50M is arranged in the vicinity of the center of the mark 50M, at least one mark such as the index pattern T1 exists in the imaging field of view fv of a mark detection system 42 when it falls within the region of the mark 50M. Consequently, the part of the mark 50M being caught by the imaging field of view fv can be grasped by detecting the index pattern from the imaging results of the mark 50M. Based on that index pattern, position of the mark 50M can be detected with high precision from L/S patterns LSx and LSy.