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Title:
MASK BLANK STORING CASE, MASK BLANK STORING METHOD AND MASK BLANK STORING BODY
Document Type and Number:
Japanese Patent JP2009102021
Kind Code:
A
Abstract:

To provide a storing case for a mask blank capable of suppressing adhesion of particles on the mask blank caused by dusting when a lid is opened and closed.

The storing case for the mask blank includes a case body 5 with an opened upper part and a lid body 6 for covering the case body 5, and stores the mask blank therein. A fixing member 8 covered from the upper part of the lid body 6 is engaged with the case body 5 at a position lower than a connecting part between the case body 5 and the lid body 6 when the lid body 6 is covered on the case body 5 to fix the lid body 6 and the case body 5.


Inventors:
MIZUKOSHI YASUHIRO
HANAOKA OSAMU
Application Number:
JP2007000273238
Publication Date:
May 14, 2009
Filing Date:
October 20, 2007
Export Citation:
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Assignee:
HOYA CORP
International Classes:
B65D85/86; B65D25/20; B65D43/06; B65D45/02; B65D77/00; G03F1/50; G03F1/66
Domestic Patent References:
JP2006256663A2006-09-28
JPS62122980A1987-06-04
JPH08172038A1996-07-02
JP2006027731A2006-02-02
JPH0714913A1995-01-17
JP2001154341A2001-06-08
JP2007201311A2007-08-09
JP2006124034A2006-05-18
JP2005035672A2005-02-10
JPS5912354U1984-01-25
Attorney, Agent or Firm:
Takeshi Otsuka