Title:
MASK BLANK STORING CASE, MASK BLANK STORING METHOD AND MASK BLANK STORING BODY
Document Type and Number:
Japanese Patent JP2009102021
Kind Code:
A
Abstract:
To provide a storing case for a mask blank capable of suppressing adhesion of particles on the mask blank caused by dusting when a lid is opened and closed.
The storing case for the mask blank includes a case body 5 with an opened upper part and a lid body 6 for covering the case body 5, and stores the mask blank therein. A fixing member 8 covered from the upper part of the lid body 6 is engaged with the case body 5 at a position lower than a connecting part between the case body 5 and the lid body 6 when the lid body 6 is covered on the case body 5 to fix the lid body 6 and the case body 5.
Inventors:
MIZUKOSHI YASUHIRO
HANAOKA OSAMU
HANAOKA OSAMU
Application Number:
JP2007273238A
Publication Date:
May 14, 2009
Filing Date:
October 20, 2007
Export Citation:
Assignee:
HOYA CORP
International Classes:
B65D85/86; B65D25/20; B65D43/06; B65D45/02; B65D77/00; G03F1/50; G03F1/66
Domestic Patent References:
JP2006256663A | 2006-09-28 | |||
JPS62122980A | 1987-06-04 | |||
JPH08172038A | 1996-07-02 | |||
JP2006027731A | 2006-02-02 | |||
JPH0714913A | 1995-01-17 | |||
JP2001154341A | 2001-06-08 | |||
JP2007201311A | 2007-08-09 | |||
JP2006124034A | 2006-05-18 | |||
JP2005035672A | 2005-02-10 | |||
JPS5912354U | 1984-01-25 |
Attorney, Agent or Firm:
Takeshi Otsuka