Title:
【発明の名称】マスク形レーザー刻印装置
Document Type and Number:
Japanese Patent JP2836273
Kind Code:
B2
Inventors:
TAKEDA YUTAKA
Application Number:
JP5925591A
Publication Date:
December 14, 1998
Filing Date:
March 25, 1991
Export Citation:
Assignee:
FUJI DENKI KK
International Classes:
B23K26/00; G02B3/06; G02B27/00; G02B27/09; (IPC1-7): B23K26/06; B23K26/00; G02B3/06; G02B27/09
Domestic Patent References:
| JP642790A | ||||
| JP60186984U |
Attorney, Agent or Firm:
Shoji Shinobe