Title:
MASTER FOR PATTERNING ACOUSTIC RECORDING AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JP3674725
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enable easy peel-off of a master from a photoresist layer, by causing a first layer provided on the photoresist to be precipitated from a sputtering target made of an NiV alloy.
SOLUTION: A first layer is made of a metal covering an embossing surface 10 which has acoustic recording in the form of protruding contour formed by a photoresist 5. An adhesive medium layer 4 holds the photoresist layer 5 on a glass plate 3. A protective layer 7 covers the first layer 6. The plate 3 is made of silicate glass having the first layer 6, the adhesive medium layer 4 and the protective layer 7. Using such a plate 3, the first metal layer 6 is precipitated onto the photoresist 5 from a sputtering target made of an NiV alloy. Then, a master 8 for patterning acoustic recording in the form of recesses (9, 9'...) spirally arranged on a circular support base is manufactured.
Inventors:
Hermann corp
Wolf-Eckhard Frice
Bernd Hansel
Wolf-Eckhard Frice
Bernd Hansel
Application Number:
JP6133496A
Publication Date:
July 20, 2005
Filing Date:
March 18, 1996
Export Citation:
Assignee:
Unaxis Deutschland Holding GmbH
International Classes:
B29C33/42; B29C45/26; B29D17/00; G11B7/26; G11B23/00; (IPC1-7): G11B7/26
Domestic Patent References:
| JP8096426A | ||||
| JP63105987A | ||||
| JP63253551A |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Reinhard Einsel
Toshiomi Yamazaki
Reinhard Einsel