Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
MEASURING SYSTEM OF DOUBLE-SIDED PROFILE OF SUBSTRATE, AND MEASURING METHOD FOR THE DOUBLE-SIDED PROFILE OF SUBSTRATE
Document Type and Number:
Japanese Patent JP2007046946
Kind Code:
A
Abstract:

To provide a measuring system of double-sided profile of a substrate and a measuring method for double-sided profile of a substrate, capable of simultaneously and accurately measuring the double-sided profile of the front and the back.

The measuring mainframe 1 has a reference plane 4 of a vertical surface plate 3 arranged at one end on a metal made bed 2 almost vertically, a holding mechanism 5 for holding a substrate P to be measured, nearly in parallel with it and a displacement meter scanning column 9. The displacement meter scanning column 9 comprises the first air slide for loading the first (second) displacement meter(s) and the second air slide for loading the third displacement meter, and moves along a pair of V-groove 10 in the horizontal axis direction. Also, the first (second) air slide(s) move in the vertical axis directions. By scanning the first (second) displacement meter(s), surface profile of one surface of the substrate plate P to be measured is measured and at the same time, by scanning the third displacement meter, the surface profile of the other side of the plate is measured.


Inventors:
AKIYAMA SHIGETAKA
AKIYAMA TAKANOBU
TANAKA TATSUICHI
UEDA KATSUNOBU
KITA YASUYUKI
Application Number:
JP2005229505A
Publication Date:
February 22, 2007
Filing Date:
August 08, 2005
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOSHIBA MACHINE CO LTD
TOSHIBA CERAMICS CO
International Classes:
G01B11/24; G01B11/00; G01M99/00; G01B21/30
Domestic Patent References:
JP2006337112A2006-12-14
JP2006234679A2006-09-07
JP2005231761A2005-09-02
JP2000292152A2000-10-20
JPH11351857A1999-12-24
JPH0218947A1990-01-23
JP2000055641A2000-02-25
JP2001124543A2001-05-11
JPH04355315A1992-12-09
JPH01136011A1989-05-29
JP2006105878A2006-04-20
JP2000337858A2000-12-08
Attorney, Agent or Firm:
松山 允之
河西 祐一
池上 徹真