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Title:
MEMBER FOR THERMAL PROCESS
Document Type and Number:
Japanese Patent JPS62123066
Kind Code:
A
Inventors:
MATSUO HIDEYASU
TANADA YOSHINOBU
ABE SHIGERU
Application Number:
JP26135385A
Publication Date:
June 04, 1987
Filing Date:
November 22, 1985
Export Citation:
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Assignee:
TOSHIBA CERAMICS CO
International Classes:
C04B35/565; C04B35/56; C04B35/58; H01L21/22; (IPC1-7): C04B35/56; H01L21/22
Domestic Patent References:
JPS5648130A1981-05-01
JPS5571677A1980-05-29
JPS6246965A1987-02-28
Attorney, Agent or Firm:
Toru Tanabe



 
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