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Title:
MESOPOROUS SILICA FILM, STRUCTURE HAVING MESOPOROUS SILICA FILM, ANTIREFLECTION FILM, OPTICAL MEMBER, AND METHODS FOR MANUFACTURING THESE
Document Type and Number:
Japanese Patent JP2012025650
Kind Code:
A
Abstract:

To hold a low refractive index of a mesoporous silica film, and simultaneously suppress the variation in the refractive index due to moisture absorption.

A surface layer in the region of a depth of <10 nm at least from one surface of a mesoporous silica film has a structure represented by SiO(2-n/2)Xn (wherein X denotes at least one selected from alkyl, fluoroalkyl and fluorine; n denotes an integer of 1 to 3; and in the case of X being alkyl or fluoroalkyl, X may partially contain an unsaturated bond). The element component ratio of the total of silicon, carbon and fluorine in the surface layer is ≥0.1, and the element component ratio of the total of carbon and fluorine to silicon in an inner layer being a region of a depth of ≥10 nm from the surface is smaller than the element component ratio in the surface layer.


Inventors:
TAKAHASHI MASAHIKO
MIYATA HIROKATSU
Application Number:
JP2011000132193
Publication Date:
February 09, 2012
Filing Date:
June 14, 2011
Export Citation:
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Assignee:
CANON KK
International Classes:
C01B37/02; B82Y20/00; B82Y30/00; C01B33/12; G02B1/11; G02B1/113
Domestic Patent References:
JP2009107863A2009-05-21
JP2002241124A2002-08-28
Attorney, Agent or Firm:
Takuma Abe
Sougo Kuroiwa