To provide a mother stamper and its manufacturing method for an ultra-resolution optical disk which can improve the surface roughness of the mother die and advanced light exposure on the photoresist of the die.

This method has a step to provide a base plate, a step to form an ultra-resolution image forming structure, a step to form a photoresist on it, a step to provide an objective lens, and a step to provide an exposure light source so that the light irradiates the base plate through the objective lens for the exposure to the photoresist layer. It also has a step that the light source irradiates the photoresist layer through the ultra-resolution image forming structure to expose the photoresist layers on the recording areas, a step to remove the photoresist layers on the recording areas to form an optical disk mother, a step to form a metal film on the optical disk mother, a step to form an electrotyping layer on the metal film, and a step to release the metal film and the electrotyping layer from the optical disk mother to form an optical disk stamper.