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Patent Searching and Data


Title:
METHOD AND APPARATUS FOR INSPECTING WORK SURFACE
Document Type and Number:
Japanese Patent JPH085573
Kind Code:
A
Abstract:

PURPOSE: To obtain a method and apparatus for inspecting the presence of a foreign matter or a protrusion highly accurately, uniformly and stably over the entire surface of a work.

CONSTITUTION: The apparatus for inspecting the presence of a foreign matter or a protrusion on the surface of a work by picking up the image of the work surface illuminated by a light source comprises a light source for illuminating the work surface and means for picking up the image of the work surface. The light source is disposed obliquely above a work on one side at such position as the work surface is illuminated at a shallow incident angle. The image pickup means is disposed obliquely above the work on the other side at such position as the image of the work surface is picked up at a shallow angle.


Inventors:
SUGIMURA TOSHIYUKI
Application Number:
JP15914594A
Publication Date:
January 12, 1996
Filing Date:
June 16, 1994
Export Citation:
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Assignee:
SUMITOMO KINZOKU CERAMICS KK
International Classes:
G01N21/88; G01N21/94; G01N21/952; (IPC1-7): G01N21/88
Attorney, Agent or Firm:
吉村 博文