Title:
METHOD AND APPARATUS FOR RECOGNIZING CHIP
Document Type and Number:
Japanese Patent JP3169046
Kind Code:
B2
Abstract:
PURPOSE: To achieve high precision positioning of a long size chip without mis-recognition by imaging one end part of the long size chip and then imaging an intermediate part nearby and further imaging the other end of the chip on the basis of the inclination of the chip detected in accordance with the recognition of those two points, etc.
CONSTITUTION: Both end parts of a long size chip 1, protruding from a visual field of a camera for image processing, are pattern-recognized. At that time, one end part of the long size chip 1 is imaged and recognized as a first point, then an intermediate part, located near to the first point, of the long size chip 1 is imaged and recognized as a second point. Then, the inclination of the long size chip 1 is detected in accordance with the recognition of those two points, and the other end of the long size chip 1 is imaged on the basis of the inclination of the long size chip 1 and recognized as a third point and its position is detected. Thus, by detecting the inclination of the long size chip, image pick-up and position detection of a desired long size chip can be carried out without mistaking an adjacent long size chip for it.
Inventors:
Motoharu Honda
Application Number:
JP8441295A
Publication Date:
May 21, 2001
Filing Date:
April 11, 1995
Export Citation:
Assignee:
NEC Machinery Co., Ltd.
International Classes:
G01B11/00; G01B11/26; G05D3/12; G06T1/00; G06T7/00; G06T7/60; H01L21/52; H01L21/68; (IPC1-7): H01L21/68; G01B11/00; G05D3/12; G06T7/60; H01L21/52
Domestic Patent References:
| JP1102607A | ||||
| JP4176133A | ||||
| JP1285805A | ||||
| JP547901A | ||||
| JP637171A |
Attorney, Agent or Firm:
Shogo Ebara (2 outside)