To eliminate the problem wherein the suction mark (flaw) of an upward protruded mold is easily formed to a green sheet at every suction hole when a vacuum suction type collet is used in transferring the green sheet and there is fear bringing about the deformation/damage of the green sheet.
The liftable collet head 7 is provided above a sheet feed line 2 for feeding the green sheet 5 made of a ceramic in a horizontal posture so as to make it possible to reciprocate between the receiving stand 3 arranged under the sheet feed line and the placing stand 4 adjacent thereto. A flat plate-shaped electrostatic attraction plate 8 attached to the undersurface of the collet head 7 and a static electricity generator for performing the charging and neutralizing of the electrostatic attraction plate 8 are provided to the collet head 7. The undersurface of the electrostatic attraction plate 8 is made flat and the green sheet 5 is detachably attracted to the flat surface of the electrostatic attraction plate 8.
Tadashi Higashino
Hiroyuki Nishi