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Patent Searching and Data


Title:
METHOD FOR CUTTING CYLINDRICAL WORKPIECE AND HOLDING TOOL FOR USE THEREIN
Document Type and Number:
Japanese Patent JP2001185513
Kind Code:
A
Abstract:

To provide a method for cutting a cylindrical workpiece which can restrict a relative oscillation between a wire and the cylindrical workpiece and can prevent cracks of a wafer; and a holding tool for use therein.

This method for cutting a cylindrical workpiece can restrict abruptly an increase in cutting resistance to be generated at the time of simultaneous cutting start of the cylindrical workpiece 1 and a holding tool 10. The holding tool 10 comprises a recess 12 in correspondence to a curved face profile of the cylindrical workpiece 1 for fixing the cylindrical workpiece 1 by use of adhesives; and edges 14a, 14b provided at both ends of the recess 12 for receiving adhesives overflowed from the recess 12, and the edges 14a, 14b are provided with a cutting end point (E-E) and forward of a wire of the recess 12.


Inventors:
KATANO TAKU
INABA AKIHIRO
Application Number:
JP36450999A
Publication Date:
July 06, 2001
Filing Date:
December 22, 1999
Export Citation:
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Assignee:
MEMC KK
International Classes:
B24B27/06; B24B41/06; H01L21/304; (IPC1-7): H01L21/304; B24B27/06
Attorney, Agent or Firm:
Ippei Watanabe