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Title:
METHOD AND DEVICE FOR CORRECTING OPTICAL AXIS IN NARROW BAND OSCILLATION EXIMER LASER DEVICE
Document Type and Number:
Japanese Patent JPH02110985
Kind Code:
A
Abstract:

PURPOSE: To prevent not only laser rays from decreasing in power but also the irradiation point of the laser rays from deviating by method wherein the recovery of the outputting laser rays in power and the correction of their deviation from an optical axis are automatically made at the same time by the adjustment of a mirror provided to a laser device side.

CONSTITUTION: Etalons 3 and 4 making laser rays narrow in bandwidth are provided between a laser head 1 charged with laser medium gas and a rear mirror 2. The laser rays projected from a front mirror are made incident on a condenser 8 through the intermediary of beam splitters 6 and 7 to converge and incident on the inlet of an optical fiber 9. Furthermore, the laser rays are guided to a wavelength detector 10 passing through the optical fiber 9, and the oscillating center wavelength and its power are detected. A CPU 11 enables the postural angle, the temperature, and the pressure of the etalons 3 and 4 to change through the intermediary of a wavelength selection element driver 12 basing on the output of the wavelength detector 10 so as to make the center wavelength component of the laser rays maximum in intensity and to execute a wavelength control to fix an oscillation wavelength.


Inventors:
WAKABAYASHI OSAMU
KOBAYASHI YUKIO
KOWAKA MASAHIKO
Application Number:
JP26360988A
Publication Date:
April 24, 1990
Filing Date:
October 19, 1988
Export Citation:
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Assignee:
KOMATSU MFG CO LTD
International Classes:
H01L21/30; H01L21/027; H01S3/034; H01S3/086; H01S3/105; H01S3/106; H01S3/134; H01S3/136; H01S3/137; H01S3/225; (IPC1-7): H01L21/027; H01S3/137



 
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