Title:
METHOD AND DEVICE FOR GLOW DISCHARGE PROCESSING
Document Type and Number:
Japanese Patent JP3044361
Kind Code:
B2
Abstract:
PURPOSE: To establish a glow discharge processing method and provide an associate device with which the responsiveness in controlling can be enhanced.
CONSTITUTION: A DC voltage converted from commercial AC by a DC control part 1 and taken out through a smoother circuit 2 is sent to an inverter switching part 3, converted into AC (rectangular wave), and supplied to the body 6 of a processing device concerned via a booster transformer 4 and a rectification part 5. A current sensing circuit 10 reads the current sensed by a current transformer 9 installed between the booster transformer 4 and rectification part 5 and sends accordingly a control signal to a thyristor control part 7 and inverter control part 8. The temp. sensing signal obtained by a temp. sensor 11 to sense the temp. of the object to be processed in a body processing chamber is supplied to the inverter control part 8.
Inventors:
Matsuzawa, Tadashi
Kubota, Yoshio
Kubota, Yoshio
Application Number:
JP24625993A
Publication Date:
May 22, 2000
Filing Date:
September 07, 1993
Export Citation:
Assignee:
NIPPON DENSHI KOGYO KK
International Classes:
C23C8/36; C23C16/50; C23C16/515; C23C26/00; H05H1/24; (IPC1-7): H05H1/24; C23C8/36; C23C16/50