To easily inspect an applied condition of a phosphor in a short time by increasing an emission quantity of red light to equal with those of green and blue lights.

A short-arc type discharge lamp 11a sealed with cadmium and rare gas in a light emitting tube and having a luminescent line between 200 nm-230 nm is used as a light source. Light from the light source 11a is emitted to the phosphor of a specimen 10 such as an image displaying substrate, fluorescent light generated in the phosphor is received by a CCD sensor 15, and displayed on a display part 17 to inspect the applied condition such as a defect of the phosphor. An image photo-received by the CCD camera 15 is allowed to be input to a controller or the like so as to automate the inspection. A dielectric barrier excimer discharge lamp provided with an electrode for conducting dielectric barrier discharge and a discharge container filled with krypton gas and chlorine gas, and having a luminescent line between 200 nm-230 nm is allowed to be used as the lamp 11a.