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Patent Searching and Data


Title:
METHOD AND DEVICE FOR SUPPLYING GAS, ESPECIALLY DIBORANE AND SILANE
Document Type and Number:
Japanese Patent JPH06205961
Kind Code:
A
Abstract:

PURPOSE: To make a mixture sent to a reactor to be a mixture from which a BPSG glass layer correctly grows by continuously measuring density of a gas or the mixture and modifying feed conditions of the gas or the mixture, if necessary.

CONSTITUTION: A storage material storage tank 2 storing an initial gaseous mixture containing diborane and silane is connected with an using reactor 3 by a conduit 1. A gas densimeter 10 having a frame 11 is installed to the conduit 1, the frame fixes a vibration tube 14 which is under magnetizing effect via a conductor 15 between an entrance 12 and an exit 13 and a manometer 16 and a thermometer 17 are incorporated into the whole. Information on frequency from a vibration frequency meter 18 is tinged with pressure and temperature, density is calculated, opening degree of a valve 21 in the conduit 1 is modified, if necessary, and/or additional flow of a mixture composed of diborane and an inert gas from an auxiliary tank 23 is controlled by a valve 22.


Inventors:
BURISERUBOO FURANSHISU
Application Number:
JP1993000291930
Publication Date:
July 26, 1994
Filing Date:
November 22, 1993
Export Citation:
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Assignee:
AIR LIQUIDE
International Classes:
B01J4/02; B01J4/00; C01B33/04; C01B35/16; C03B37/014; C23C16/52; F17C13/02; G01N9/00; (IPC1-7): B01J4/02; C01B33/04; C01B35/16
Attorney, Agent or Firm:
Shigeru Yagita (2 outside)