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Patent Searching and Data


Title:
METHOD AND EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR THIN FILM
Document Type and Number:
Japanese Patent JPH06283450
Kind Code:
A
Abstract:

PURPOSE: To form a high-quality quantum fine line and a high-quality quantum box which have no contamination or damage.

CONSTITUTION: A conductive probe is brought by a slight movement section 5 several nm above a heated substrate 9 which is mounted on a substrate holder 3. Then, voltage is applied between the conductive probe 4 and the substrate 9 to cause tunnel current to flow. By this method, a methyl group of a methyl gallium monomolecular layer attached to the substrate 9 is freed.


Inventors:
KOBAYASHI NAOKI
Application Number:
JP1993000091938
Publication Date:
October 07, 1994
Filing Date:
March 29, 1993
Export Citation:
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Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
H01L21/205; H01L21/365; H01L29/06; H01S5/00; (IPC1-7): H01L21/205; H01L21/365
Attorney, Agent or Firm:
山川 政樹