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Title:
METHOD AND EQUIPMENT FOR RECOVERING AND REUTILIZING DRAIN GENERATED IN DEVELOPING PROCESS
Document Type and Number:
Japanese Patent JP2001276825
Kind Code:
A
Abstract:

To provide a recovery/reutilization method of a drain generated in a developing process, which enable reutilization of the drain in the developing process by performing effective treatment of the drain, and also to provide an equipment for the recovery/reutilization method.

In this method, a drain generated in a development process is treated with at least a membrane treatment unit, the resulting treated water is recovered and reutilized in the developing process. It is preferably that the drain in treated with a reverse osmosis membrane unit and an ion exchange unit, and further the resulting treated water is treated with a filtration membrane unit which is provided with filtration membrane having ≤1 μm pore size and placed at or in the vicinity of the terminal of this treatment stage to obtain final treated water, and the recovered final treated water is reutilized in the developing process. This equipment for the recover/reutilization process comprises the above units and also a pipeline system for returning the recovered final treated water to the developing process in order to reutilize the treated water.


Inventors:
SUGAWARA HIROSHI
KAWADA KAZUHIKO
HIDAKA MASAO
Application Number:
JP2000000093716
Publication Date:
October 09, 2001
Filing Date:
March 30, 2000
Export Citation:
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Assignee:
ORGANO KK
International Classes:
C02F1/44; B01D61/02; B01D61/14; B01D61/48; B01D61/58; C02F1/20; C02F1/32; C02F1/42; C02F1/469; C02F1/72; C02F9/00; H01L21/027; (IPC1-7): C02F1/44; B01D61/02; B01D61/14; B01D61/48; B01D61/58; C02F1/20; C02F1/32; C02F1/42; C02F1/469; C02F1/72; C02F9/00; H01L21/027
Attorney, Agent or Firm:
三浦 進二