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Title:
METHOD FOR MANUFACTURING GASKET FOR PRECISE EQUIPMENT
Document Type and Number:
Japanese Patent JP2001225392
Kind Code:
A
Abstract:

To provide a method for manufacturing a gasket for a precise equipment capable of manufacturing in high productivity by performing sufficient sealing performance and using an X-Y-Z axes coating robot.

After a liquid-like material having so-called high thixotropy to maintain a high viscosity in a steady state for increasing fluidity in a dynamic state applied by a stress is discharged from a nozzle of the X-Y-Z axes coating robot in a string-like state on a surface of a base of a dust preventive cover of the precise equipment, the discharged material is irradiated with an active energy beam to be cured to obtain a gasket. Thus, since the sectional shape of the discharged material can be held in an ideal sectional shape while discharging the material to the surface of the base in a good efficiency and a high productivity from the nozzle of the robot, the gasket having sufficient sealing performance can be manufactured in a high productivity.


Inventors:
WATANABE TETSUYA
YOKOYAMA TAKASHI
Application Number:
JP2000039878A
Publication Date:
August 21, 2001
Filing Date:
February 17, 2000
Export Citation:
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Assignee:
NIPPON MEKTRON KK
International Classes:
C08J7/00; B29C67/00; C09K3/10; (IPC1-7): B29C67/00; C09K3/10
Attorney, Agent or Firm:
Kazuo Sato (3 others)