To provide a method for manufacturing a gasket for a precise equipment capable of manufacturing in high productivity by performing sufficient sealing performance and using an X-Y-Z axes coating robot.
After a liquid-like material having so-called high thixotropy to maintain a high viscosity in a steady state for increasing fluidity in a dynamic state applied by a stress is discharged from a nozzle of the X-Y-Z axes coating robot in a string-like state on a surface of a base of a dust preventive cover of the precise equipment, the discharged material is irradiated with an active energy beam to be cured to obtain a gasket. Thus, since the sectional shape of the discharged material can be held in an ideal sectional shape while discharging the material to the surface of the base in a good efficiency and a high productivity from the nozzle of the robot, the gasket having sufficient sealing performance can be manufactured in a high productivity.
YOKOYAMA TAKASHI
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