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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING MICRO TUBE STRUCTURE
Document Type and Number:
Japanese Patent JP2003266393
Kind Code:
A
Abstract:

To manufacture inexpensive, simple, and highly productive micro tubes.

The method for manufacturing a micro tube structure according to this invention comprises steps of: preparing a first and a second substrate; forming an adhesive layer on at least one substrate of the first and the second substrates; forming a resist layer on the adhesive layer; printing a desired pattern on the resist layer by means of a photo-process; forming recesses or through-holes at the first substrate by simultaneously etching the adhesive layer and at least one substrate which carries the adhesive layer by means of the patterned resist as a mask; and joining and unifying the first and the second substrates by means of the adhesive layer by heating and sticking by pressure.


Inventors:
KONDO TAKESHI
Application Number:
JP2002000064370
Publication Date:
September 24, 2003
Filing Date:
March 08, 2002
Export Citation:
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Assignee:
AGILENT TECHNOLOGIES INC
International Classes:
B81C1/00; B81B1/00; B81C3/00; (IPC1-7): B81C1/00; B81C3/00
Attorney, Agent or Firm:
加藤 公久