Title:
METHOD OF MANUFACTURING THIN-FILM ELEMENT
Document Type and Number:
Japanese Patent JP2007242778
Kind Code:
A
Abstract:
To provide a method of manufacturing a thin-film element in which a metal oxide film of a (100) orientation can be easily formed.
The method of manufacturing the thin-film element includes a step of forming a titanium oxide film 16 on the upper part of a base by a method of applying a titanium compound solution, a step of forming a Pt-based lower electrode film 20 on the upper part of the titanium oxide film 16, and a step of forming a metal oxide film 22 containing at least any one of a lead titanate and a lead zirconate on the upper part of the Pt-based electrode film 20.
COPYRIGHT: (C)2007,JPO&INPIT
Inventors:
HAMADA YASUAKI
OHASHI KOJI
OHASHI KOJI
Application Number:
JP2006060952A
Publication Date:
September 20, 2007
Filing Date:
March 07, 2006
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L21/8246; H01L27/105; H01L41/09; H01L41/187; H01L41/22; H01L41/318; H01L41/319
Attorney, Agent or Firm:
Yoshiyuki Inaba
Katsuro Tanaka
Shinji Oga
Katsuro Tanaka
Shinji Oga
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