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Patent Searching and Data


Title:
METHOD FOR MEASUREMENT
Document Type and Number:
Japanese Patent JP2012134333
Kind Code:
A
Abstract:

To detect the fact that a work having a thickness deviating from a standard is carried in before starting the processing in a processing device which forms a modified layer in the work by condensing a laser beam.

While holding a work 1 carried in holding means 40, are carried out the two steps of: a first measurement step for measuring the height position of a top face 1a of the work 1 by optical measuring means 70; and a second measurement step for measuring the height position of an adhesive face 10a of a protective tape 10 set on the reference surface. Distance from the top face 1a of the work 1 to the reference surface is detected by the difference between the values obtained by the first measurement step and second measurement step, and a determination is made whether or not the thickness of the work 1 thus carried in deviates from the standard.


Inventors:
NAKAMURA MASARU
Application Number:
JP2010285393A
Publication Date:
July 12, 2012
Filing Date:
December 22, 2010
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B23K26/00; B23K26/38; B23K26/40; G01B11/06; H01L21/66; H01L21/683
Domestic Patent References:
JP2005340423A2005-12-08
JP2005222987A2005-08-18
JP2009152288A2009-07-09
JP2007095952A2007-04-12
Attorney, Agent or Firm:
Suenari Mikio