To detect the fact that a work having a thickness deviating from a standard is carried in before starting the processing in a processing device which forms a modified layer in the work by condensing a laser beam.
While holding a work 1 carried in holding means 40, are carried out the two steps of: a first measurement step for measuring the height position of a top face 1a of the work 1 by optical measuring means 70; and a second measurement step for measuring the height position of an adhesive face 10a of a protective tape 10 set on the reference surface. Distance from the top face 1a of the work 1 to the reference surface is detected by the difference between the values obtained by the first measurement step and second measurement step, and a determination is made whether or not the thickness of the work 1 thus carried in deviates from the standard.
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