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Title:
METHOD FOR PEELING CARRIER FILM AND PEELING DEVICE
Document Type and Number:
Japanese Patent JP2000271922
Kind Code:
A
Abstract:

To perform a highly productive peeling operation without damage, stretching or the generation of protrusions/recesses and facilitate the treatment of a film after peeling by sucking one of the corner parts of a ceramic green sheet more strongly than the other corner part and retaining the one corner part, from which first a carrier film is peeled, and after this process, peeling the carrier film across the entire region in the almost tangential direction.

A green sheet(gs) 2 with a carrier film(cf) 1 sticking thereto is disposed on the suction face 4a of a vacuum suction box 3 in such a manner that the (cf) 1 face is turned upward, and a vacuum force is made to act upon the suction face 4a with the help of a low vacuum pressure pump 7 and a high vacuum pressure pump 8 and thereby, the (gs) 2 is retained by suction. In this case, the vacuum pressure of the pump 8 is differentiated from the vacuum pressure of the pump 7. Further, the (gs) 2 on the corner part 2b of the suction face 4a is sucked with a force which is specified times as strong as the other suction part and retained in that state. Next, a pressure-sensitive adhesive member of a (cf) 1 release part is pressed to the (cf) 1 of the (gs) 2 on the corner part 2b and is uplifted to peel the (cf) 1 from the (gs) 2. Thus it is possible to perform a highly productive peeling operation by which the (cf) 1 can be easily discharged after peeling without causing creases, protrusions/ recesses, stretching and the like.


Inventors:
TANIGUCHI MASANOBU
SUGINO KAZUNORI
Application Number:
JP1999000082709
Publication Date:
October 03, 2000
Filing Date:
March 26, 1999
Export Citation:
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Assignee:
HITACHI METALS LTD
International Classes:
B28B1/30; B28B13/06; (IPC1-7): B28B13/06