To provide a method of regulating a current detecting circuit and an inspecting device which can raise the accuracy of current detecting by the current detecting circuit.
Current sources Cur1d-Cur4d and Cur1s-Cur4s are respectively provided to electrodes Ed1-Ed4 and Es1-Es4 arranged to a detected body (output transistor Mo). When the current is applied to the above detected body so that the current voltage characteristic of the current detecting circuit should be regulated, the current (but is also equally) is applied to the electrode pair of the detected body, respectively. Further, the current states of these current sources Cur1d-Cur4d and Cur1s-Cur4s is supervised, respectively. When the current capacity of this current source is less than the predetermined value, it is judged that a probe is in a noncontact state about the electrode corresponding to the current source.
NAGATA JUNICHI
Makoto Onda