Title:
METHOD FOR REMOVING HYDRIDE GAS AND APPARATUS THEREFOR
Document Type and Number:
Japanese Patent JPH09239232
Kind Code:
A
Abstract:
PURPOSE: To eliminate the clogging caused by the generation of a powder by simple constitution and to perfectly remove mixed gas containing a plurality of hydride gases to detoxify the same.
CONSTITUTION: Mixed gas containing at least two or more kinds of hydride gases is brought into contact with nickel fluoride and nickel to be decomposed and/or adsorbed to be removed. Further, hydride gases of the group III or V elements are brought into contact with nickel to be decomposed and/or adsorbed to be removed.
Inventors:
OMI TADAHIRO
Application Number:
JP18495194A
Publication Date:
September 16, 1997
Filing Date:
August 05, 1994
Export Citation:
Assignee:
OMI TADAHIRO
International Classes:
B01D53/34; B01D53/46; B01D53/86; B01J23/755; (IPC1-7): B01D53/46; B01D53/34
Attorney, Agent or Firm:
Fukumori Hisao
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