Title:
MICRO-ACTUATOR AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3050164
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent the breakage of a mover or a spring supporting the mover and the malfunction, etc., of a micro-actuator by preventing the intrusion of foreign matters between the mover and stators by surrounding the mover and spring with the stators.
SOLUTION: A mciro-actuator is composed of a pair of stators 1 and 2 fixed to a semiconductor substrate and a mover 3 separated from the substrate. In order to protect the mover 3 and a spring 4 which are apt to be broken when an external object comes into contact with them, the periphery of the mover 3 and spring 4 are surrounded with the stators 1 and 2. In addition, the bottom sides and top sides of the mover 3 and spring 4 are covered with the semiconductor substrate and a stage 6. Therefore, no external object directly comes into contact with the mover 3 and spring 4. In addition, since the intrusion of foreign matters, such as very fine dust, etc., becomes very little as compared with the conventional structure, the breakage of the mover 3 and spring 4 and the malfunction, etc., of the micro-actuator can be prevented surely.
More Like This:
Inventors:
Kenichiro Suzuki
Application Number:
JP13361797A
Publication Date:
June 12, 2000
Filing Date:
May 23, 1997
Export Citation:
Assignee:
NEC
International Classes:
G11B21/02; G11B5/55; H02N1/00; (IPC1-7): H02N1/00; G11B21/02
Domestic Patent References:
| JP7322649A | ||||
| JP9113534A | ||||
| JP576187A | ||||
| JP8116686A | ||||
| JP4368479A |
Attorney, Agent or Firm:
Masaki Yamakawa