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Title:
MICROFABRICATION DEVICE, MICROFABRICATION METHOD, TRANSFER MOLD, AND TRANSFER OBJECT
Document Type and Number:
Japanese Patent JP2020049646
Kind Code:
A
Abstract:
To provide a novel and improved microfabrication device, microfabrication method, transfer mold and transfer object that can inhibit generation of defects.SOLUTION: A microfabrication device comprises a tool mounting portion, a predetermined cutting tool, an oscillator, and a controller. The controller performs a cutting process to satisfy at least one of: a cutting condition (1) that oscillations at a start point and an end point of each set are in phase with each other; and a cutting condition (2) that oscillations of the sets are in phase with each other.SELECTED DRAWING: Figure 1A

Inventors:
NODA KAZUHIKO
DOI KATSUHIRO
NOGAMI TOMOHIKO
SAKURAI KYOKO
Application Number:
JP2019055111A
Publication Date:
April 02, 2020
Filing Date:
March 22, 2019
Export Citation:
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Assignee:
DEXERIALS CORP
International Classes:
B23B1/00; B23B5/14; B23B5/48; B23D3/02; B23D5/02; B29C33/38; G02B1/04
Attorney, Agent or Firm:
Kenji Sugimura
Mitsutsugu Sugimura
Koji Kakinuma