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Title:
MICROWAVE DISCHARGE PROCESSOR
Document Type and Number:
Japanese Patent JP3236370
Kind Code:
B2
Abstract:

PURPOSE: To perform substrate processing with good repeatability for long by preventing a vacuum container and a substrate stage from being magnetized by a long-time operation.
CONSTITUTION: An electromagnet coil 4 creating a magnetic field in a plasma production area 10 of a vacuum container 1 into which the discharge gases and microwave are introduced is provided with a means 42 for reversing the current in the electromagnet coil 4. The means 42 is equipped with switches for changing the polarity and controlled to reverse the current for every other batch or during an idle time between batches. Thus, the magnetizations of the vacuum container 1 and substrate stage 5 are eliminated by the backward magnetic field produced by the backward current and the intensity of magnetizations becomes substantially zero.


Inventors:
Ikeda, Kei
Application Number:
JP1992000312630
Publication Date:
December 10, 2001
Filing Date:
October 29, 1992
Export Citation:
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Assignee:
ANELVA CORP
International Classes:
H01L21/203; C23C16/511; H01L21/205; H01L21/302; H01L21/3065; H01L21/31; (IPC1-7): H01L21/3065; C23C16/511; H01L21/205
Attorney, Agent or Firm:
保立 浩一