Title:
真空処理装置用開閉機構及び真空処理装置
Document Type and Number:
Japanese Patent JP4437743
Kind Code:
B2
Inventors:
Keisuke Kondo
Application Number:
JP2004368817A
Publication Date:
March 24, 2010
Filing Date:
December 21, 2004
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; H01L21/3065; C23C16/44
Domestic Patent References:
| JP2003007623A | ||||
| JP9310766A | ||||
| JP2002009125A | ||||
| JP2005140151A |
Attorney, Agent or Firm:
Saichi Suyama