To provide an optical filter device, an optical filter module, and an analysis apparatus which achieve power saving and increase wiring reliability.
The optical filter device comprises a first substrate 51, a second substrate 52 that faces the first substrate 51, a first reflection film 56 that is provided on the first substrate 51, a second reflection film 57 that is provided on the second substrate 52 to face the first reflection film 56, a first electrode 541 that is provided on the first substrate 51, a second electrode 542 that is provided on the second substrate 52 to face the first electrode 541, a pair of first lead-out electrodes 541A that is provided on the first substrate 51 and is connected to the first electrode 541, and a pair of second lead-out electrodes 542A that is provided on the second substrate 52 and is connect to the second electrode 542.
SANO AKIRA
JP2008116669A | 2008-05-22 | |||
JP2005055670A | 2005-03-03 | |||
JP2005165067A | 2005-06-23 | |||
JP2005173504A | 2005-06-30 | |||
JP2005099206A | 2005-04-14 |
須澤 修
宮坂 一彦
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