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Title:
OPTICAL FILTER DEVICE, OPTICAL FILTER MODULE, AND ANALYSIS APPARATUS
Document Type and Number:
Japanese Patent JP2011227224
Kind Code:
A
Abstract:

To provide an optical filter device, an optical filter module, and an analysis apparatus which achieve power saving and increase wiring reliability.

The optical filter device comprises a first substrate 51, a second substrate 52 that faces the first substrate 51, a first reflection film 56 that is provided on the first substrate 51, a second reflection film 57 that is provided on the second substrate 52 to face the first reflection film 56, a first electrode 541 that is provided on the first substrate 51, a second electrode 542 that is provided on the second substrate 52 to face the first electrode 541, a pair of first lead-out electrodes 541A that is provided on the first substrate 51 and is connected to the first electrode 541, and a pair of second lead-out electrodes 542A that is provided on the second substrate 52 and is connect to the second electrode 542.


Inventors:
SHINTO SUSUMU
SANO AKIRA
Application Number:
JP2010095711A
Publication Date:
November 10, 2011
Filing Date:
April 19, 2010
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G02B26/00; B81B3/00; G01J3/26; G01J3/46
Domestic Patent References:
JP2008116669A2008-05-22
JP2005055670A2005-03-03
JP2005165067A2005-06-23
JP2005173504A2005-06-30
JP2005099206A2005-04-14
Attorney, Agent or Firm:
上柳 雅誉
須澤 修
宮坂 一彦