Title:
OPTICAL GAS ANALYSIS SYSTEM AND GAS FLOW CELL
Document Type and Number:
Japanese Patent JP2010217031
Kind Code:
A
Abstract:
To provide a gas flow cell allowing accurate consecutive high-sensitivity gas analysis without contamination of a surface of a mirror, an optical window or the like present in each of both ends of the gas flow cell caused by particles occurring inside a process chamber.
This optical gas analysis system includes: the T-shaped gas flow cell 1a formed with one sample gas introduction port 18 in an approximate center of a long axis direction along a direction orthogonal to the long axis direction; and a photoelectric conversion chamber 75 converting optical information from the gas flow cell 1a into an electric signal.
Inventors:
AKIYAMA OSAMU
MORIYA TAKESHI
YAMAWAKI JUN
MORIYA TAKESHI
YAMAWAKI JUN
Application Number:
JP2009064920A
Publication Date:
September 30, 2010
Filing Date:
March 17, 2009
Export Citation:
Assignee:
SHIMADZU CORP
TOKYO ELECTRON LTD
TOKYO ELECTRON LTD
International Classes:
G01N21/05; G01N21/15; G01N21/27
Domestic Patent References:
| JPH0220153U | 1990-02-09 | |||
| JPH095232A | 1997-01-10 | |||
| JP2008164576A | 2008-07-17 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Masakazu Ito
Suzuki Isobe
Masakazu Ito
Suzuki Isobe
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