Title:
ORGANIC LAYER DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE SAME, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD
Document Type and Number:
Japanese Patent JP2014019954
Kind Code:
A
Abstract:
To provide an organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the organic layer deposition apparatus, and an organic light-emitting display apparatus manufactured by the method.
This invention provides an organic layer deposition apparatus that is further suitable for a mass production process of a large substrate and enables high-definition patterning, a method of manufacturing an organic light-emitting display apparatus by using the organic layer deposition apparatus, and an organic light-emitting display apparatus manufactured by the method.
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Inventors:
CHOI YOUNG MOOK
Application Number:
JP2013146915A
Publication Date:
February 03, 2014
Filing Date:
July 12, 2013
Export Citation:
Assignee:
SAMSUNG DISPLAY CO LTD
International Classes:
C23C14/12; C23C14/04; H01L51/50; H05B33/10; H05B44/00
Domestic Patent References:
| JP2011049167A | 2011-03-10 | |||
| JP2006302898A | 2006-11-02 |
Foreign References:
| WO2011034011A1 | 2011-03-24 | |||
| WO2007099929A1 | 2007-09-07 | |||
| WO2012056877A1 | 2012-05-03 |
Attorney, Agent or Firm:
Nobuyuki Matsunaga
Tetsuji Tsuji
Tetsuji Tsuji