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Title:
ORGANOCOPPER COMPOUND AND MIXED LIQUID CONTAINING THE SAME AND COPPER THIN FILM MADE OF THE MIXED LIQUID
Document Type and Number:
Japanese Patent JP2002128787
Kind Code:
A
Abstract:

To provide a mixed liquid containing an organocopper compound, having long service life and hard to decompose before a film formation, affording a high film formation rate, efficiently decomposing on a substrate film, to give high volatile products, and capable of giving a copper thin film of high adhesion to the substrate film.

The objective organocopper compound is such that a β-diketone compound and a silyloxy group-bound unsaturated hydrocarbon compound are coordinated to a univalent copper atom and is shown by the formula (1) (wherein, R is an unsaturated hydrocarbon compound-derived group; L is a β-diketone compound-derived group; and X1, X2 and X3 are each H, a 1-5C alkyl or 1-4C alkoxy).


Inventors:
SAI ATSUSHI
OGI KATSUMI
Application Number:
JP2000302405A
Publication Date:
May 09, 2002
Filing Date:
October 02, 2000
Export Citation:
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Assignee:
MITSUBISHI MATERIALS CORP
International Classes:
C07F7/08; C07F7/18; C07F19/00; C23C16/18; H01L21/28; H01L21/285; (IPC1-7): C07F7/18; C07F19/00; C23C16/18; H01L21/285
Attorney, Agent or Firm:
Masayoshi Suda