To provide a pattern formation method, a droplet jetting device, and a circuit substrate capable of forming a high-precision pattern for a short time.
A stage 23 loads a green sheet 4G on a gas-permeable stage plate 23b and heats the green sheet 4G at a predetermined temperature with a rubber heater H provided at the lower side of the plate 23b. The stage 23 decompresses inside of the stage 23b by decompressing the lower side of the plate 23b through a suction path, thereby decompressing the entire lower side of the green sheet 4G loaded on the plate 23b. The droplet Fb impacted on the green sheet 4G further promoting evaporation towards inside of the green sheet 4G. This allows the drying time of a metal ink impacted on the green sheet 4G to be further shortened.
MIURA HIROTSUNA
JP2006239565A | 2006-09-14 | |||
JP2003133692A | 2003-05-09 | |||
JP2005057140A | 2005-03-03 | |||
JP2005502452A | 2005-01-27 |
Osamu Suzawa
Kazuhiko Miyasaka
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