Title:
PATTERN MATCHING METHOD AND APPARATUS THEREOF
Document Type and Number:
Japanese Patent JP2007005818
Kind Code:
A
Abstract:
To provide a pattern matching method and apparatus thereof that is operator-free and fully automatic, and can realize a high throughput.
The pattern matching method and apparatus for carrying out pattern matching between design data and the image taken by a scanning electron microscope converts the design data into a bitmap, and carries out the matching between the bitmapped design data and the image taken by a scanning electron microscope. After the bitmap is edge-enhanced, the matching process is carried out. Furthermore, after a smoothing process is performed on the edge-enhanced bitmap, the matching process is carried out.
Inventors:
TAKANE ATSUSHI
YODA HARUO
YOSHIDA MASASHI
IKEDA KOJI
OZAWA YASUHIKO
YODA HARUO
YOSHIDA MASASHI
IKEDA KOJI
OZAWA YASUHIKO
Application Number:
JP2006201138A
Publication Date:
January 11, 2007
Filing Date:
July 24, 2006
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/66; G01B15/04; G06T7/00
Attorney, Agent or Firm:
Yusuke Hiraki
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