Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PELLICLE FRAME AND METHOD FOR PRODUCING THE PELLICLE FRAME
Document Type and Number:
Japanese Patent JP2017134093
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To improve the shape of a bottomed hole used for the positioning of a pellicle frame.SOLUTION: Provided is a pellicle frame formed into a frame shape. In the case the outer circumference thereof is provided with at least one bottomed hole 12 for positioning, the part other than the central part at the bottom part of the bottomed hole has a conical shape through which the central axis passes through almost the center of the bottom part, and the central part being a buffer part 80 with a planar or curved shape whose tilting is slower than a flat shape or a conical shape. In the case the pellicle frame is formed with a conducting material, the bottomed hole 12 is worked into the above shape by electric discharge.SELECTED DRAWING: Figure 8

Inventors:
KIMURA YUKIHIRO
Application Number:
JP2016011205A
Publication Date:
August 03, 2017
Filing Date:
January 25, 2016
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NGK SPARK PLUG CO
International Classes:
G03F1/64; B23H9/00; B23H9/14; B23P15/00
Domestic Patent References:
JP2010102357A2010-05-06
JP2007283412A2007-11-01
JPH0569324A1993-03-23
JP2005313258A2005-11-10
JP2010221391A2010-10-07
JP2012181499A2012-09-20
JPH09204039A1997-08-05
JP2012103638A2012-05-31
JPS6249153U1987-03-26
JP2003107678A2003-04-09
JPH0739047U1995-07-14
JP2017076024A2017-04-20
JP2016122091A2016-07-07
JPS6249153U1987-03-26
Attorney, Agent or Firm:
特許業務法人明成国際特許事務所