Title:
PELLICLE AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3429897
Kind Code:
B2
Abstract:
PURPOSE: To produce a pellicle not causing a wrinkle or strain in the pellicle film because the pellicle film is tightly bonded to the pellicle frame.
CONSTITUTION: A pellicle film contg. a solvent dissolving a pellicle film forming polymer as a residual solvent is formed. An adhesive layer is formed on a pellicle frame by coating with an adhesive having the same compsn. as the pellicle film or similar in compsn. to the pellicle film and the pellicle film is allowed to adhere to the adhesive layer and bonded to the pellicle frame by heating to a temp. below the glass transition temp. of the polymer to produce the objective pellicle.
Inventors:
Yuichi Hamada
Satoshi Kawakami
Tohru Shirasaki
Yoshihiko Nagata
Shu Kashida
Yoshihiro Kubota
Satoshi Kawakami
Tohru Shirasaki
Yoshihiko Nagata
Shu Kashida
Yoshihiro Kubota
Application Number:
JP10353695A
Publication Date:
July 28, 2003
Filing Date:
April 27, 1995
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F1/62; H01L21/027; (IPC1-7): G03F1/14; H01L21/027
Domestic Patent References:
| JP667409A | ||||
| JP4369650A |
Attorney, Agent or Firm:
Kaneji Arai
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