Title:
PHOTOELECTRIC POSITION MEASURING APPARATUS
Document Type and Number:
Japanese Patent JP2935454
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a photoelectric position measuring apparatus whose safety against a disturbance is improved and in which a position-dependent scanning signal is not influenced by the electrostatic charging of a scale plate.
SOLUTION: In the photoelectric position measuring apparatus, a scale plate 5 which is fixed to a holder body 1, which comprises a mark 8 and which is composed of a nonconductive material is provided, the scale plate is photoelectrically scanned by a scanner 9 which is moved relatively to a measuring direction X with reference to the mark 8 in order to generate a position- depnendent scanning signal, and the scanner 9 is supported in the surface region of the scale plate 5 by a sliding or rolling member 12. In the photoelectric position measuring apparatus, the surface region of the scale plate 5 or at least a surface region which is arranged near the surface region comes into electric contact with a conductive material 13, and a conductive connecting member 14 is installed between the conductive material 13 and a reference potential 15.
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Inventors:
GYUNTAA NERE
PEETAA FUERUNZEPUNAA
PEETAA FUERUNZEPUNAA
Application Number:
JP10639497A
Publication Date:
August 16, 1999
Filing Date:
April 23, 1997
Export Citation:
Assignee:
DOKUTORU YOHANESU HAIDENHAIN GMBH
International Classes:
G01B11/00; G01B21/02; G01D5/347; (IPC1-7): G01D5/34; G01B11/00; G01B21/02
Domestic Patent References:
| JP61128122A | ||||
| JP3108713A | ||||
| JP2241984A | ||||
| JP51106458A | ||||
| JP61102819U | ||||
| JP4116728U |
Attorney, Agent or Firm:
Mitsufumi Esaki (2 others)