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Patent Searching and Data


Title:
PHOTOMASK AND EXPOSURE METHOD
Document Type and Number:
Japanese Patent JP2013104960
Kind Code:
A
Abstract:

To provide a photomask installed on a normal contact exposure apparatus or a proximity exposure apparatus in parallel to an irradiation object body without any necessity of inclining the irradiation object body, and capable of performing diagonal exposure with a plurality of different angles by a single exposure to the irradiation object body.

The photomask emits parallel light that is perpendicular to the photomask and emitted by an exposure apparatus, to an irradiation object body in an inclined manner. The photomask includes a diffraction optical element formed on the irradiation surface side of a transparent substrate, and a pattern of a light transmission part that selectively transmits diffraction light from the diffraction optical element, formed on an emission surface side of the transparent substrate.


Inventors:
NAKAMURA DAISUKE
HAYASHI KOKI
Application Number:
JP2011247561A
Publication Date:
May 30, 2013
Filing Date:
November 11, 2011
Export Citation:
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Assignee:
TOPPAN PRINTING CO LTD
International Classes:
G03F1/68; G03F7/20